LCD, OLED AOI (Automatic Optical Inspection)
- Gen6 ~ Gen10.5 Panel 대응
- TDI Line Scan 기술을 이용한 대면적 고속 검사
- 패널 이송방식에 따라 In-line과 Stand-alone 방식으로 구분
- In-line AOI: Air floating, Roller conveyer, TDI Line Scan camera, Microscope
- Stand-alone AOI: Anti vibration granite stage, Air bearing, TDI Line Scan camera, Microscope
- Defect Threshold Setting
- Defect Classification
- Line Scan Image Merge
- Line Scan Image Upload
- MMG (Multi Model Glass) Inspection
- Pass / Fail Judgment
- Illumination Feedback Control
- Defect Shrinkage / Defect Merging
- Defect Map Viewer
- False Defect Masking
- Mask Defect Alarm
- Inspection on C/F process
- TDI line scan camera, Special dark field illumination
- Air floating / Roller conveyer
- Gen8 glass (2500x2200mm)
- High speed review system
- Inspection on OLED LTPS process
- Line scan camera, Special dark field illumination
- Gen6 glass (1850x1500mm)
- Split axes granite stage
- Auto focus review system (Passive/Active)
